Park Systems Atomic Power Microscope XE-15

Instrument Profile:

Park XE-15 ee kɛ̈l ye kɛ̈l ye kɛ̈l ye kɛ̈l ye kɛ̈l ye kɛ̈l ye kɛ̈l ye kɛ̈l. A ye sampol table juëc looi, a ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈ XY scanner ye cɔl closed loop ye cɔl decoupled ye cɔl bending effect error ye cɔl linearity ye cɔl. Real non-contact scanning mode, ye kä juëc ye kek looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi

Park Systems Atomic Power Microscope XE-15 Parameters Technical:

Skaner

Skaner XY

Flexible Guided Closed Loop Control Single Module Scanner

Scanning range 100μm*100μm (optional 50μm*50μm)

Yïïn ye cɔl plane offset: <2nm (40μm*40μm scan)

Skaner Z

Flexible Guide Powerful Scanner

Scanning range 12μm (optional 25μm)

Resonance frequency: >5kHz

Lɔ̈ɔ̈i ye tïŋ piny: 0.03nm

Sample Table

Sample table type: 16-bit sample table/150mm diameter vacuum adsorption table (optional 200mm diameter vacuum adsorption table)

Sample size: 150mm * 150mm * 20mm

Sample weight: zui 500g

Sample Table Movement Range: 150mm * 150mm (optional 200mm * 200mm)

Karakteristika:

A. Design de table de samples de ɣän juëc ye kek looi, bï baara ya looi

● Luɔi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi

● Sample setup simple, scan fast

● A bɛ kunnafoniw tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n

II. Support super large samples, satisfying industry development needs

● zui dït ye 200 mm wafer kony, bï kɔc wïc bɛ̈n ya looi

● Luɔɔi cï kek looi bï kɔc ye luui në semiconductor ya looi

Third, sugandin mode de luɔɔi

● Kuen SPM ye kɛ̈n ye kɛ̈n ye kɛ̈n ye kɛ̈n ye kɛ̈n ye kɛ̈n ye kɛ̈n ye kɛ̈n

●Support multi-option measurement modes

●Support of various optional accessories, extending superior performance